Particle Characteristic Diagnosis System
| Particle Size Distribution Measurement | |
| Detectable Particle Size | AU& PT (Guarantee) |
| Measuring Resolution | 10nm |
| Operating Pressure | 0.03~1 Torr |
| Functions | · Monitoring Mode: Real-Time Response for Specific Size · Scanning Mode: Minimum 20 sec for Specific Size Range |
| · Visualization Measurement | |
| Magnification | x20 to x3000,000 |
| Resolution | 3nm (at 30kV SE) |
| Detector | SE Detector, BSE Detector |
| Image Mode | RED, TV, Slow, Photo (1280×960 to 5120×3840 pixels) |
| · Composition Measurement | |
| Detectable Element | C(6) ~U(92) |
| Resolution | 133eV |
| Analysis | Spectrum Analysis, Line Analysis, Mapping Analysis |
| Dimension | 600(W) x 895(L) x 1300(H) mm |
| Weight | 80Kgf |
| Operating System | Window 7 |