Particle Characteristic Diagnosis System

Particle Size Distribution Measurement
Detectable Particle Size AU& PT (Guarantee)
Measuring Resolution 10nm
Operating Pressure 0.03~1 Torr
Functions · Monitoring Mode: Real-Time Response for Specific Size
· Scanning Mode: Minimum 20 sec for Specific Size Range
· Visualization Measurement
Magnification x20 to x3000,000
Resolution 3nm (at 30kV SE)
Detector SE Detector, BSE Detector
Image Mode RED, TV, Slow, Photo (1280×960 to 5120×3840 pixels)
· Composition Measurement
Detectable Element C(6) ~U(92)
Resolution 133eV
Analysis Spectrum Analysis, Line Analysis, Mapping Analysis
Dimension 600(W) x 895(L) x 1300(H) mm
Weight 80Kgf
Operating System Window 7

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