SEM CX-200
| Magnification | x15 ~ x300,000 (Effective :~ x100,000) |
| Resolution | 3.0nm [at 30kV, SE image] |
| Accelerating Voltage | 1kV to 30kV |
| Electron Gun | Tungsten Filament(w) |
| Detector | SE Detector (Optional : BSE,EDS) |
| Stage | 4-Axis Manual Stage System x: 40mm，Y: 40mm T: -20˚~90˚, R: 360˚，Z:5 to 60mm(Motorized) |
| Sample Size | 55mm (H)，130mm (Diameter) |
| Image Mode(pixel) | · RDE (320×240), TV (640×480), Slow (800×600) · Photo (1280×960, 2560×1920, 5120×3840) |
| Frame Rate | · RDE (MAX. 30 frames/sec) · TV (MAX. 10 frames/sec) · Slow (MAX. 2 frames/sec) |
| Vacuum System | Turbo Molecular Pump (Less than 3min) |
| Auto Functions | Focus, Filament, Contrast, Brightness |
| OS | · Windows7 |
| Operation | Key Board/Mouse |
| Dimension | 400 (W) x 600(L) x 550 (H)mm，95kg |