Advanced SEM-EDS Total Solution EM-30AX Plus
| Magnification | x20 ~ x150,000 (Effective :~ x80,000) |
| Accelerating Voltage | 1kV to 30kV |
| Electron Gun | Tungsten Filament(w) |
| Detector | SE Detector, BSE Detector, EDS |
| Stage | X: 35mm (Motorized)，Y: 35mm (Motorized) T: 0 to 45° (Motorized)，R: 360° ，Z: 5 to 50mm(Manual) |
| Maximum Sample Size | 45mm (H)，60mm (Diameter) |
| Image Mode(pixel) | · RDE (320×240), TV (640×480), Slow (800×600) · Photo (1280×960, 2560×1920, 5120×3840) |
| Frame Rate | · RDE (MAX. 30 frames/sec) · TV (MAX. 10 frames/sec) · Slow (MAX. 2 frames/sec) |
| Vacuum System | Turbo Molecular Pump (Less than 3min) |
| Auto Functions | Auto Focus, Contrast, Brightness, Filament, Start |
| OS | · Windows7 |
| Operation | Keyboard/Mouse/Joystick |
| Special Features | · Navigation View · Special Multi Sample Holder · Signal Mixing (SE+BSE)Dual Display(SE/BSE) · Integrated BSE(Compo, Topo) · Line Profile · Image Process · Measurement Tool · Remote Control |